{rfName}
Th

Indexed in

License and Use

Icono OpenAccess

Citations

21

Altmetrics

Analysis of institutional authors

Zamorano, J. C.AuthorDel Canizo, C.Author

Share

June 9, 2019
Publications
>
Article
Sí

Thermal Shields for Heat Loss Reduction in Siemens-Type CVD Reactors

Publicated to: ECS Journal of Solid State Science and Technology. 5 (3): P172-P178 - 2016-01-01 5(3), DOI: 10.1149/2.0171603jss

Authors:

Ramos, A; Valdehita, J; Zamorano, JC; del Cañizo, C
[+]

Affiliations

Univ Politecn Madrid, ETSI Telecomunicac, Inst Energia Solar, E-28040 Madrid, Spain - Author

Abstract

The use of thermal shields to reduce radiation heat loss in Siemens-type CVD reactors is analyzed, both theoretically and experimentally. The potential savings from the use of the thermal shields is first explored using a radiation heat model that takes emissivity variations with wavelength into account, which is important for materials that do not behave as gray bodies. The theoretical calculations confirm that materials with lower surface emissivity lead to higher radiation savings. Assuming that radiation heat loss is responsible for around 50% of the total power consumption, a reduction of 32.9% and 15.5% is obtained if thermal shields with constant emissivities of 0.3 and 0.7 are considered, respectively. Experiments considering different thermal shields are conducted in a laboratory CVD reactor, confirming that the real materials do not behave as gray bodies, and proving that significant energy savings in the polysilicon deposition process are obtained. Using silicon as a thermal shield leads to energy savings of between 26.5-28.5%. For wavelength-dependent emissivities, the model shows that there are significant differences in radiation heat loss, of around 25%, when compared to that of constant emissivity. The results of the model highlight the importance of having reliable data on the emissivities within the relevant range of wavelengths, and at deposition temperatures, which remains a pending issue. (c) 2016 The Electrochemical Society. All rights reserved.
[+]

Keywords

Validation

Quality index

Bibliometric impact. Analysis of the contribution and dissemination channel

The work has been published in the journal ECS Journal of Solid State Science and Technology due to its progression and the good impact it has achieved in recent years, according to the agency Scopus (SJR), it has become a reference in its field. In the year of publication of the work, 2016, it was in position , thus managing to position itself as a Q1 (Primer Cuartil), in the category Electronic, Optical and Magnetic Materials.

Independientemente del impacto esperado determinado por el canal de difusión, es importante destacar el impacto real observado de la propia aportación.

Según las diferentes agencias de indexación, el número de citas acumuladas por esta publicación hasta la fecha 2026-04-25:

  • WoS: 10
  • Scopus: 11
[+]

Impact and social visibility

From the perspective of influence or social adoption, and based on metrics associated with mentions and interactions provided by agencies specializing in calculating the so-called "Alternative or Social Metrics," we can highlight as of 2026-04-25:

  • The use of this contribution in bookmarks, code forks, additions to favorite lists for recurrent reading, as well as general views, indicates that someone is using the publication as a basis for their current work. This may be a notable indicator of future more formal and academic citations. This claim is supported by the result of the "Capture" indicator, which yields a total of: 6 (PlumX).

It is essential to present evidence supporting full alignment with institutional principles and guidelines on Open Science and the Conservation and Dissemination of Intellectual Heritage. A clear example of this is:

  • The work has been submitted to a journal whose editorial policy allows open Open Access publication.
  • Assignment of a Handle/URN as an identifier within the deposit in the Institutional Repository: https://oa.upm.es/38994/

As a result of the publication of the work in the institutional repository, statistical usage data has been obtained that reflects its impact. In terms of dissemination, we can state that, as of

  • Views: 496
  • Downloads: 357
[+]

Leadership analysis of institutional authors

There is a significant leadership presence as some of the institution’s authors appear as the first or last signer, detailed as follows: First Author (Ramos, A.) and Last Author (CAÑIZO NADAL, CARLOS DEL).

[+]

Awards linked to the item

The Spanish Ministerio de Economia y Competitividad is acknowledged for its support through the IPT 2012-0340-120000 project and Comunidad de Madrid through the MADRID-PV S2013/MAE-2780 project.
[+]