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Grant support

This work has been supported by the Ministerio de Educacion y Ciencia of Spain through project no. MAT2004-00175 and by the Junta de Comunidades de Castilla-La Mancha through contract no. PAC05-001-2.

Analysis of institutional authors

Olivares, J.Corresponding AuthorMalo, J.AuthorIborra, E.AuthorIzpura, I.AuthorClement, M.AuthorSanz-Hervas, A.Author

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Proceedings Paper

Tunable mechanical resonator with aluminum nitride piezoelectric actuation

Publicated to:Proceedings Of Spie - The International Society For Optical Engineering. 6186 (61860K): 61860K- - 2006-08-09 6186(61860K), DOI: 10.1117/12.664444

Authors: Olivares, J; Malo, J; González, S; Iborra, E; Izpura, I; Clement, M; Sanz-Hervás, A; Sánchez-Rojas, JL; Sanz, P

Affiliations

Univ Castilla La Mancha, Depo Ingenieria Elect Elect & Automat, Ciudad Real, Spain - Author
Univ Politecn Madrid, Grp Microsistemas & Mat Elect, Madrid, Spain - Author

Abstract

The electromechanical response of piezoelectrically-actuated AIN micromachined bridge resonators has been characterized using laser interferometry and electrical admittance measurements. We compare the response of microbridges with different dimensions and buckling (induced by the initial residual stress of the layers). The resonance frequencies are in good agreement with numerical simulations of the electromechanical behavior of the structures. We show that it is possible to perform a rough tuning of the resonance frequencies by allowing a determined amount of built-in stress in the microbridge during its fabrication. Once the resonator is made, a DC bias added to the AC excitation signal allows to fine-tune the frequency. Our microbridges yield a tuning factor of around 88 Hz/V for a 500 mu m-long microbridge.

Keywords

AlnAluminum nitrideFabricationMicrobridgesMicroresonatorPiezoelectric actuationPolysiliconSimulationThin-film

Quality index

Bibliometric impact. Analysis of the contribution and dissemination channel

The work has been published in the journal Proceedings Of Spie - The International Society For Optical Engineering due to its progression and the good impact it has achieved in recent years, according to the agency Scopus (SJR), it has become a reference in its field. In the year of publication of the work, 2006, it was in position , thus managing to position itself as a Q2 (Segundo Cuartil), in the category Electrical and Electronic Engineering.

From a relative perspective, and based on the normalized impact indicator calculated from the Field Citation Ratio (FCR) of the Dimensions source, it yields a value of: 2.15, which indicates that, compared to works in the same discipline and in the same year of publication, it ranks as a work cited above average. (source consulted: Dimensions Jun 2025)

Specifically, and according to different indexing agencies, this work has accumulated citations as of 2025-06-11, the following number of citations:

  • WoS: 4
  • Scopus: 9
  • OpenCitations: 4

Impact and social visibility

From the perspective of influence or social adoption, and based on metrics associated with mentions and interactions provided by agencies specializing in calculating the so-called "Alternative or Social Metrics," we can highlight as of 2025-06-11:

  • The use of this contribution in bookmarks, code forks, additions to favorite lists for recurrent reading, as well as general views, indicates that someone is using the publication as a basis for their current work. This may be a notable indicator of future more formal and academic citations. This claim is supported by the result of the "Capture" indicator, which yields a total of: 12 (PlumX).

It is essential to present evidence supporting full alignment with institutional principles and guidelines on Open Science and the Conservation and Dissemination of Intellectual Heritage. A clear example of this is:

  • The work has been submitted to a journal whose editorial policy allows open Open Access publication.

Leadership analysis of institutional authors

There is a significant leadership presence as some of the institution’s authors appear as the first or last signer, detailed as follows: First Author (OLIVARES ROZA, JIMENA) .

the author responsible for correspondence tasks has been OLIVARES ROZA, JIMENA.